{"id":5214,"date":"2024-10-25T12:14:31","date_gmt":"2024-10-25T03:14:31","guid":{"rendered":"http:\/\/1stn.kr\/?p=5214"},"modified":"2024-10-25T12:14:51","modified_gmt":"2024-10-25T03:14:51","slug":"%ea%b2%bd%ea%b8%b0%eb%8f%84-%ea%b9%80%eb%8f%99%ec%97%b0%ec%a7%80%ec%82%ac-10%ec%9b%9427%ec%9d%bc11%ec%9b%942%ec%9d%bc-%ec%9c%a0%eb%9f%bd-%ec%a7%84%ec%b6%9c-%ea%b5%90%eb%91%90%eb%b3%b4","status":"publish","type":"post","link":"http:\/\/1stn.kr\/?p=5214","title":{"rendered":"\uacbd\uae30\ub3c4, \uae40\ub3d9\uc5f0\uc9c0\uc0ac 10\uc6d427\uc77c~11\uc6d42\uc77c \u2018\uc720\ub7fd \uc9c4\ucd9c \uad50\ub450\ubcf4\u2019 \uc624\uc2a4\ud2b8\ub9ac\uc544\u00b7\ub124\ub35c\ub780\ub4dc \ubc29\ubb38 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5 \uae00\ub85c\ubc8c \ud611\ub825 \uac15\ud654 \ucca8\ub2e8\uc0b0\uc5c5 \ub4f1 \ud22c\uc790\uc720\uce58 \uc138\uc77c\uc988"},"content":{"rendered":"<p>\uae40\ub3d9\uc5f0 \uacbd\uae30\ub3c4\uc9c0\uc0ac\uac00 \ubbf8\uad6d\uc5d0 \uc774\uc5b4 \uc624\uc2a4\ud2b8\ub9ac\uc544\uc640 \ub124\ub35c\ub780\ub4dc \ub4f1 \uc720\ub7fd\uc744 \ubc29\ubb38\ud574 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5 \uae00\ub85c\ubc8c \ud611\ub825 \uac15\ud654, \ucca8\ub2e8\uc0b0\uc5c5 \ud22c\uc790\uc720\uce58 \uc138\uc77c\uc988 \ud589\ubcf4\ub97c \uc774\uc5b4\uac04\ub2e4.<\/p>\n<p>\uacbd\uae30\ub3c4\ub294 10\uc6d4 27\uc77c\ubd80\ud130 11\uc6d4 2\uc77c\uae4c\uc9c0 \uae40\ub3d9\uc5f0 \uacbd\uae30\ub3c4\uc9c0\uc0ac\ub97c \ub2e8\uc7a5\uc73c\ub85c \ud55c \uacbd\uae30\ub3c4\ub300\ud45c\ub2e8\uc774 \uc911\ubd80 \uc720\ub7fd\uc5d0 \uc704\uce58\ud55c \uc624\uc2a4\ud2b8\ub9ac\uc544\uc640 \ub124\ub35c\ub780\ub4dc\ub97c \ubc29\ubb38\ud574 \uacbd\uae30\ub3c4 \uae30\uc5c5\ub4e4\uc758 \uc720\ub7fd \uc9c4\ucd9c\uc744 \uc704\ud55c \uac00\uad50\ub97c \ub193\uc744 \uc608\uc815\uc774\ub77c\uace0 25\uc77c \ubc1d\ud614\ub2e4.<\/p>\n<p>\uae40\ub3d9\uc5f0 \uc9c0\uc0ac\ub294 \uc9c0\ub09c 15\uc77c\ubd80\ud130 21\uc77c\uae4c\uc9c0 5\ubc15 7\uc77c\uac04 \ubbf8\uad6d \ub274\uc695 \ub4f1 \ub3d9\ubd80\uc9c0\uc5ed\uc744 \ubc29\ubb38\ud574 \uce90\uc2dc \ud638\uceec \ub274\uc695 \uc8fc\uc9c0\uc0ac, \uae00\ub80c \uc601\ud0a8 \ubc84\uc9c0\ub2c8\uc544 \uc8fc\uc9c0\uc0ac\uc640 \ud611\ub825\uad00\uacc4\ub97c \uad6c\ucd95\ud558\ub294 \ud55c\ud3b8 \ucd1d 2\uc870 1\ucc9c\uc5b5 \uc6d0\uc758 \ud22c\uc790 \uc720\uce58\ub97c \ud55c \ubc14 \uc788\ub2e4.<\/p>\n<p>\uc6b0\uc120 \ub124\ub35c\ub780\ub4dc\uc5d0\uc11c \uc138\uacc4\uc801 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uae30\uc5c5\uc778 \uc5d0\uc774\uc5d0\uc2a4\uc5e0(ASM)\uacfc \uc5d0\uc774\uc5d0\uc2a4\uc5e0\uc5d8(ASML)\uc758 \ubcf8\uc0ac\ub97c \uac01\uac01 \ubc29\ubb38\ud574 \ud22c\uc790\ud611\ub825 \ubc29\uc548 \ub4f1\uc744 \ub17c\uc758\ud560 \uc608\uc815\uc774\ub2e4.<\/p>\n<p>1968\ub144 \uc124\ub9bd\ub41c ASM\uc740 \ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc5d0 \ud544\uc218\uc801\uc778 \uc6d0\uc790\uce35 \uc99d\ucc29\uae30\uc220(ALD)\uae30\uc220 \uc2dc\uc7a5\uc758 \ub9ac\ub354\ub85c \uc5f0\ub9e4\ucd9c 3\uc870 8\ucc9c\uc5b5 \uc6d0 \uaddc\ubaa8\uc758 \uc138\uacc4\uc801 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uae30\uc5c5\uc774\ub2e4.<\/p>\n<p>ASML\uc740 1984\ub144 \uc124\ub9bd\ud574 \uc5f0\ub9e4\ucd9c 276\uc5b5 \uc720\ub85c(2023\ub144 \uae30\uc900, \uc57d 40\uc870 \uc6d0)\ub97c \uae30\ub85d\ud55c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud575\uc2ec\uacf5\uc815\uc758 \ud558\ub098\uc778 \u2018\ub178\uad11(Lithography)\u2019 \ubd84\uc57c \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uc804\uc138\uacc4 1\uc704 \uae30\uc5c5\uc774\ub2e4. \uc720\uc77c\ud558\uac8c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \ud544\uc218\uc801\uc778 \uadf9\uc790\uc678\uc120(EUV) \ub9ac\uc18c\uadf8\ub798\ud53c(\uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc5d0 \ud68c\ub85c \ud328\ud134\uc744 \ud615\uc131\ud558\ub294 \uacf5\uc815) \uc7a5\ube44\uac00 \uc0dd\uc0b0 \uac00\ub2a5\ud558\ub2e4.<\/p>\n<p>\ucca8\ub2e8\uc0b0\uc5c5 \ub4f1 \uae00\ub85c\ubc8c \ud611\ub825\ub3c4 \uac15\ud654\ud55c\ub2e4. \u2018\uc911\uc18c\uae30\uc5c5 \uac15\uad6d\u2019 \uc624\uc2a4\ud2b8\ub9ac\uc544\uc758 \ub178\ub3d9\uacbd\uc81c\ubd80 \uc7a5\uad00\uc744 \ub9cc\ub09c \uacbd\uc81c\u00b7\uc0b0\uc5c5 \ub4f1 \ubd84\uc57c\ubcc4 \ud611\ub825 \ud655\ub300\ub97c \ubaa8\uc0c9\ud558\uace0, \ub124\ub35c\ub780\ub4dc\uc758 \u2018\ucca8\ub2e8\uc0b0\uc5c5 \uc911\uc2ec\uc9c0\u2019 \ub178\ub974\ud2b8\ube0c\ub77c\ubc18\ud2b8\uc8fc\uc640 \uc2e0\uaddc \uc6b0\ud638\ud611\ub825\uc744 \uccb4\uacb0\ud55c\ub2e4.<\/p>\n<p>\uc774\uc678 \uc804\uc138\uacc4 \uacbd\uc81c\uc778 \uc57d 3\ucc9c \uba85\uc774 \ucc38\uac00\ud558\ub294 \u2018\uc81c28\ucc28 \uc138\uacc4\ud55c\uc778\uacbd\uc81c\uc778\ub300\ud68c\u2019 \uac1c\ud68c\uc2dd\uc5d0 \uae30\uc870\uac15\uc5f0\uc790\ub85c \ub098\uc124 \uc608\uc815\uc774\uba70 \ud589\uc0ac\uc7a5\uc5d0 \ub9c8\ub828\ub41c \uacbd\uae30\ub3c4\uad00\uc744 \uc911\uc2ec\uc73c\ub85c \ub3c4\ub0b4 \uae30\uc5c5\uc758 \uc720\ub7fd \uc9c4\ucd9c\uc758 \ub9c8\uc911\ubb3c \uc5ed\ud560\uc744 \uc218\ud589\ud560 \uac83\uc73c\ub85c \uae30\ub300\ub41c\ub2e4.<\/p>\n<p>\uacbd\uae30\ub3c4 \uad00\uacc4\uc790\ub294 \u201c\uc720\ub7fd \uc911\uc2ec\uc5d0 \uc704\uce58\ud55c \uc624\uc2a4\ud2b8\ub9ac\uc544\uc5d0\uc11c\ub294 \ud604\uc9c0 \uc815\u00b7\uc7ac\uacc4 \uc778\uc0ac\ub97c \ub9cc\ub098 \uacbd\uae30\ub3c4 \uae30\uc5c5\uc758 \uc720\ub7fd\uc9c4\ucd9c \ud574\uacb0\uc0ac \uc5ed\ud560\uc744 \ub9e1\uc744 \uac83\uc774\uba70, \ub124\ub35c\ub780\ub4dc\uc5d0\uc11c\ub294 \uad6d\uc81c\uad50\ub958 \uac15\ud654\ubfd0\ub9cc \uc544\ub2c8\ub77c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc7a5\ube44 \uae30\uc5c5\uc744 \ucc3e\uc544 \ud22c\uc790\ud611\ub825\uc744 \uc801\uadf9 \ub17c\uc758\ud558\uaca0\ub2e4\u201d\uba70 \u201c\uc9c0\ub09c \ubbf8\uad6d \ucd9c\uc7a5\uc5d0 \uc774\uc5b4 \uc758\ubbf8 \uc788\ub294 \uc131\uacfc\ub97c \uc774\uc5b4\uac08 \uc218 \uc788\ub3c4\ub85d \ud558\uaca0\ub2e4\u201d\uace0 \ub9d0\ud588\ub2e4.<\/p>\n<p style=\"text-align: right;\">1stn@hanmail.net \uae40\uc601\ub82c\uae30\uc790<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\uae40\ub3d9\uc5f0 \uacbd\uae30\ub3c4\uc9c0\uc0ac\uac00 \ubbf8\uad6d\uc5d0 \uc774\uc5b4 \uc624\uc2a4\ud2b8\ub9ac\uc544\uc640 \ub124\ub35c\ub780\ub4dc \ub4f1 \uc720\ub7fd\uc744 \ubc29\ubb38\ud574 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5 \uae00\ub85c\ubc8c \ud611\ub825 \uac15\ud654, \ucca8\ub2e8\uc0b0\uc5c5 \ud22c\uc790\uc720\uce58 \uc138\uc77c\uc988 \ud589\ubcf4\ub97c \uc774\uc5b4\uac04\ub2e4. \uacbd\uae30\ub3c4\ub294 10\uc6d4 27\uc77c\ubd80\ud130 11\uc6d4 2\uc77c\uae4c\uc9c0 \uae40\ub3d9\uc5f0 \uacbd\uae30\ub3c4\uc9c0\uc0ac\ub97c \ub2e8\uc7a5\uc73c\ub85c \ud55c \uacbd\uae30\ub3c4\ub300\ud45c\ub2e8\uc774 \uc911\ubd80 \uc720\ub7fd\uc5d0 \uc704\uce58\ud55c \uc624\uc2a4\ud2b8\ub9ac\uc544\uc640 \ub124\ub35c\ub780\ub4dc\ub97c \ubc29\ubb38\ud574 \uacbd\uae30\ub3c4 \uae30\uc5c5\ub4e4\uc758 \uc720\ub7fd \uc9c4\ucd9c\uc744 \uc704\ud55c \uac00\uad50\ub97c \ub193\uc744 \uc608\uc815\uc774\ub77c\uace0 25\uc77c \ubc1d\ud614\ub2e4. \uae40\ub3d9\uc5f0 \uc9c0\uc0ac\ub294 \uc9c0\ub09c 15\uc77c\ubd80\ud130 21\uc77c\uae4c\uc9c0 5\ubc15 7\uc77c\uac04 \ubbf8\uad6d \ub274\uc695 \ub4f1 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":5215,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[31,26,12],"tags":[826,2240,2529,2528,2527,589],"class_list":["post-5214","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-happen","category-anews","category-firstnews","tag-826","tag-2240","tag-2529","tag-2528","tag-2527","tag-589","et-has-post-format-content","et_post_format-et-post-format-standard"],"_links":{"self":[{"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/posts\/5214","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/1stn.kr\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=5214"}],"version-history":[{"count":2,"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/posts\/5214\/revisions"}],"predecessor-version":[{"id":5217,"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/posts\/5214\/revisions\/5217"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/1stn.kr\/index.php?rest_route=\/wp\/v2\/media\/5215"}],"wp:attachment":[{"href":"http:\/\/1stn.kr\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=5214"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/1stn.kr\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=5214"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/1stn.kr\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=5214"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}